Download PDF by Masato Fujinaga, Norihiko Kotani (auth.), J. Lorenz (eds.): 3-Dimensional Process Simulation

By Masato Fujinaga, Norihiko Kotani (auth.), J. Lorenz (eds.)

ISBN-10: 3709169054

ISBN-13: 9783709169056

ISBN-10: 3709174309

ISBN-13: 9783709174302

Whereas two-dimensional semiconductor strategy simulation has completed a undeniable measure of adulthood, three-d approach simulation is a newly rising box during which such a lot efforts are devoted to invaluable simple advancements. study during this region is promoted via the growing to be call for to procure trustworthy details on gadget geometries and dopant distributions wanted for third-dimensional gadget simulation, and challenged through the good algorithmic difficulties because of relocating interfaces and via the requirement to restrict computation occasions and reminiscence specifications. A workshop (Erlangen, September five, 1995) supplied a discussion board to debate the economic wishes, technical difficulties, and recommendations being constructed within the box of third-dimensional semiconductor strategy simulation. Invited shows from best semiconductor businesses and study facilities of Excellence from Japan, the united states, and Europe defined novel numerical algorithms, actual types, and purposes during this quickly rising field.

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Simulation_wi thout_TED' 'simu lation _with_TED' 'SIMS' le +20 z 0 H Eo< le +l9 0::: Eo< Z le+18 ~ r::J u Z 0 le+1 7 Eo< le+16 u >< H .. 0::: => 0.. 4 (urn) Figure 5: Drain profile of boron for p-channel MOSFET For the effective interstitial distribution, the supersaturation model of interstitials under oxidizing condition is assumed at the silicon surface in the SijSi02 system [16] . ·gen 1- At the bottom of silicon , the boundary condition is given by C I C eg ) I . (13) = C? 3. Oxidation The physical model of oxidation is based on a steady-state oxidant diffusion and a slow incompressible viscous flow of oxide [20] .

T. 50°C, there is a discrepancy between simulation and STM data, in particular, H. :>" simulation -----STM data ...... . £ m A c~ .... 0 NORMARIZED DISTANCE Figure 19: Direct comparison of the surface profile in the AB and AC direction in the hole structure. 52 H. 9 (b) 900 "c (a) 850"( Figure 20: Distribution of the vertical component of flow velocity obtained by simulation. 6 850 °C . • ... :. um N2 30 min 600 ~ f 400 ~ .. 200 simulation OL-~~~--~~~-~~~~ o 10 CHARACTERISTIC FLOW 20 LENGTH A ( ~ m) Figure 21: Universal curve of the surface height in the line structure.

Dig. , pp. 541-543, 1991 [6] N. Shimizu, Y. Naito, Y. Itoh, Y. Shibata, K. Hashimoto, M. Nishio, A. Asai, K. Ohe, H. Umimoto and Y. Hirofuji, " A poly-buffer recessed LOCOS process for 256Mbit DRAM cells, " in Tech. Dig. , pp. 279-282, 1992 [7] H. Umimoto, S. Odanaka, 1. Nakao and H. Esaki, " Numerical modeling of nonplanar oxidation coupled with stress effects, " IEEE Trans. Computer-Aided Design, vol. 8, no. 6, pp. 599-607, June 1989 [8] H. Umimoto, S. Odanaka and 1. Nakao, " Numerical simulation of stress-dependent oxide growth at convex and concave corners of trench structures, " IEEE Electron Device Letters, vol.

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3-Dimensional Process Simulation by Masato Fujinaga, Norihiko Kotani (auth.), J. Lorenz (eds.)


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